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Thin Film Deposition System


  • Physical vapor deposition of thin films (thermal and by sputtering): metals, alloys, oxides
  • Precision control of film thickness with quartz crystal sensors
  • Performed in high vacuum for film purity
  • Applications: well-defined planar metal films for corrosion studies, studies of interfacial interactions, and protective polymer coatings, deposition on various types of substrates, including polymers